The convention that applies to small machine to make machines a method

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Summary: ? ? of any of several hot spice plants of し of need of purpose of Piao of ┨ of suddenly of ostrich of ず of commonplace of Ku of Xing of city of  of Shun of Juan of the larva of a tapeworm or the cercaria of a schistosome if turning, auger cut, milling, punch, electric spark, electrochemistry, electroform) the treatment characteristic in machining a domain imperceptibly, pass paradigmatic introducing gains success. The application that personal computer fetterses to wait for a domain in production of science and technology, industry and agriculture and military affairs is increasingly wide, at present so called personal computer fetterses, divide roughly it is two kinds big: A kind say for system of small mechanical electron (MEMS) , side overweight uses integrated circuit but yuan of parts of an apparatus or appliance that compatible technology treatment makes, be fetters microelectronics and personal computer compositive together, reach personal computer form namely its are sent move implement, processor of controller, sensor, signal and interface, communication and power source compositive inside a little space, the part that produces mechanical function shapes Electromechanical unifinication system. Another kind is small the tradition after shrinking is mechanical, be like plane of car of micro computer bed, miniature, miniature, personal computer implement the person. As to small inflexible demand grow increasingly, the method of imperceptible treatment also is increasing ceaselessly and develop, all sorts of groovy treatment methods, the cutting treatment that includes a tradition and method of a few non-traditional machining also are in domain of Xiang Wei fine treatment is outspread. The turning in machining a method like convention, milling, auger cut, grinding, punch, non-traditional machining method is medium electric spark, electrochemistry, supersonic, laser, ionic bundle, electron beam. Carry out a proof, groovy cutting treatment is in miniature is three-dimensional structure, small send move implement make have the effect that cannot replace, what its use equipment to reach its to run an environment simpler, one-time investment is lesser, production program is flexible big, what get used to Yu Wei machinery already is medium small lot is produced, can pass a mould again treatment, electroform, note the method such as model to realize batch production. Imperceptible cutting processing technique thinks commonly, cutting force exists inevitably in cutting treatment, should be gone to by treatment of treatment spare parts when imperceptible measure, will arise very big be out of shape happen even destroy, accordingly, cutting treatment cannot realize imperceptible treatment. But, through ceaseless exploration and practice, imperceptible cutting also machines the part that gave micron measure. Turning introduces below, auger cut, the characteristic when the imperceptible treatment such as milling, punch and gain success. 1.

Imperceptible turning turning is treatment circumgyrate kind the effective method of the spare parts, when machining small small-sized part not exceptional also. The key of imperceptible turning depends on: The lathe that 1) miniature changes; 2) turning condition monitors a system; The main shaft of precision of 3) high rotate speed, tall circumgyrate; The servo feed system of 4) high resolution; 5) point of a knife is enough small, hardness is enough tall lathe tool. Japan opens lab of project of machinery of courtyard of technology yield a province (the lathe prototype that MEL) developed the 1st miniature to change 1996, this lathe long 32mm, wide 25mm, tall 30.

5mm, weight is 100g; Rated power of main shaft electric machinery 1.

5W, rotate speed 10, 000r/min. With brass of cutting of this machine tool, the exterior surface roughness of edge feed direction is Rmax1.

5µm, the circularity that processes work is 2.

5µm, what treatment goes out is the smallest outside round diameter is 60µm. This golden lustre university studied day system of an imperceptible turning, by imperceptible lathe, control unit, optics is microscopical system and monitor composition, machine tool length makes an appointment with 200mm. Because be machined work is very little, it is very difficult to observe with naked eye, reason uses optics microscopical the system will observe cutting position. The main shaft power of the machine tool: 0.

5W; Rotate speed: 3, 000 ～ 15, 000r/min, successive gearshift; Radial and jumpy: 1µm less than; Install clip workpiece diameter: Ø0.

3mm; The feed resolution of axis of X, Y, Z is 4nm. The diamond explore needle that goes up with scanning channel microscope serves as lathe tool, Ø0 is in the diameter.

The brass silk of 3mm machines face of the cylinder outside giving what the diameter is Ø10µm on semifinished product, returned treatment to give a diameter to be Ø120µm, pitch 12.

The guide screw of 5µm. It confirmed the part that uses cutting treatment to also can machine a micron dimension. 2.

Get imperceptibly cut get imperceptibly cut use at machining a diameter to be less than Ø0 commonly.

The aperture of 5mm, already made one of the vitallest technology of imperceptible aperture treatment now, times latterer get attention. Get the preparation that one of cut keys are tiny bit imperceptibly. Current, the smallest diameter of the tiny bit that commerce supplies is Ø50µm, want to get finer bit, must have the aid of at non-traditional machining method, if use focusing ion,Shu Jianshe technology made what the diameter is Ø13µm, Ø22µm and Ø35µm respectively get, milling cutting tool. But, equipment of focusing ion Shu Jianshe is sophisticated, treatment rate is slower. With grinding of electrode of electric spark line (the bit that WEDG) technology makes Ø10µm steadily, the smallest can amount to Ø6.

5µm. The aperture diameter Ø6 that gets on monocrystalline silicon with this broach.

7µm, deepness 10µm. 3.

Imperceptible milling can realize imperceptible milling aleatoric figure is small the treatment of three-dimensional structure, productivity is tall, facilitate patulous function. What the research of imperceptible milling fetterses to the micro computer is practical change development very valuable. The imperceptible milling machine that Japanese MEL develops, grow 170mm, wide 170mm, tall 102mm. Main shaft is not had with what power is 36W brush dc servo electric machinery, rotate speed is about 15, 600r/min. This milling machine can mill is planar also can bore. Japanese FANUC company and the lathe that collaboration of electric communication university develops exceed accurate milling machine, first realized free curved surface with cutting method imperceptible treatment on alive bound. This kind exceeds accurate cutting processing technique to be able to use cutting cutting tool to be opposite those who include a metal inside all sorts of but cutting material has imperceptible treatment, and can use CAD/CAM technology to realize three-dimensional CNC Machining, productivity is tall, opposite precision is tall. In be the Japanese that uses milling of this machine tool, be called " can face " miniature types of facial makeup in operas. These treatment data are measured by 3 coordinate machine in true " can face " on collect, use diamond of odd blade single crystal globose milling cutter (SR=30µm) , the three-dimensional and free curved surface that go out is machined on 18K gold material. Its diameter is Ø1mm, exterior discretion difference is 30µm, the exterior surface roughness that gets after treatment is Rz0.

058µm. This is the imperceptible processing technique in photoetching technology domain, be like craft of semiconductor plane silicon, and photoetching of deepness of ray of synchronous radiate, X, eletroplate the place such as the LIGA craft of craft and composition of casting model craft not as good as. 4.

Imperceptible punch is in instrument bearing manufacturing industry, often see the panel that contains a lot of alveolus, method of commonly used punching machines the alveolus on panel, productivity is tall, the alveolus dimension of treatment is stable, punch wears away slow, life is long. When large quantities of quantities are produced, its cost is lower than other method much. The research direction of strong alveolus technology is the size that how reduces punching machine, increase the intensity of tiny punch and stiffness, those who assure tiny punch is oriented wait with protection. The small punch machine tool that MEL develops, grow 111mm, wide 66mm, tall 170mm. Of the communication servo electric machinery of a 100W, can generate the pressure of 3kN. The whirl of servo electric machinery takes transmission and changeover of drive of ball guide screw to become linear exercise through synchronism. This punch machine tool contains successive strong tool set, can come true rush to cut into parts and be bent board. Institute of technology of production of Japanese Tokyo university uses WEDG technology, EDM technology compound, can make the drift that small punch uses and die, undertake imperceptible punch is machined next, in 50µm thick polyamide is plastic go up to be not a circle to what gave width to be 40µm sectional small hole. 5.

MEL of miniature factory Japan advanced the idea of miniature factory 1990, made prototype of factory of the 1st desktop miniature at was being designed 1999, cover an area of an area to be 70cm × 50cm, can be machined into travel turning, milling, punch and assemble. To prove the portable sex of miniature factory, MEL designed prototype of factory of the 2nd miniature at was being designed 2000 -- portable miniature factory. It by miniature lathe, milling machine, punch, carry manipulator, double point to the composition such as manipulator and circuit, control equipment, weight is 23kg, be put in the case of long 625mm, wide 490mm, tall 380mm, heavy 11kg. Case bottom contains truckle, can push like viatic box go. Technology of imperceptible non-traditional machining 1.

Treatment of imperceptible electric spark realizes what the key that imperceptible electric spark machines depends on small electrode to make, status of the minim servo feed of electrode of power source of tiny energy discharge, tool, treatment detects reach systematic control to wait. Grinding of electric spark of electrode of line of application of kick one's heels of Zeng Zelong of Japanese Tokyo university (WEDG) technology, solved imperceptible electrode satisfactorily make and install a problem, treatment gave Ø2.

The small stoma of the imperceptible axis of 5µm and Ø5µm. Still can feel imperceptible electroanalysis with WEDG technology, imperceptible and supersonic, imperceptible auger cut, the preparation tool such as imperceptible milling, imperceptible punch, it is the Ø6 that makes with WEDG technology.

5µm tiny bit. Because the tiny electrode itself of complex form does not have legal system extremely hard to make even, and the severe loss of the electrode in machining a process, make shape the appearance of electrode is changed very quickly, and the treatment of three-dimensional curved surface that cannot have high accuracy. Because this people begins to explore the electrode that uses simple figure, draw lessons from craft of numerical control milling to undertake the electric spark of imperceptible and three-dimensional outline is machined. Tokyo undergraduate produces technical institute to use the imperceptible electrode of simple appearance, through milling of imperceptible electric spark treatment gave small car pattern, break up with this mould make the small car model that gave to be 500µm, 300µm, 200µm longly, widely, high respectively. 1997, the small chamfer of the miniature gear that the company below Japanese pine made reference circle diameter be 50µm of Ø300µm, tooth depth and wide 5µm, long 150µm. It is the small three-dimensional structure that gives with treatment of imperceptible electric spark, this structure has a variety of mechanical part on the cylinder of 155µm, be like hemisphere, chamfer, gear, screw. 2.

Electrochemical machining of imperceptible electrochemical machining is to use electrochemistry of metallic positive pole the treatment method of deliquescent purify material. Through reducing treatment voltage, raise pulse frequency and reduce electrolyte concentration, can have been treatment space control under 10µm. German Roll Schuster and G.

The Ertl electrochemistry that put forward a kind of electric double layer to restrain the treatment that engrave corrode to exceed small stereo structure machines a method imperceptibly, its machine used electrobath to install what control drive of electric pottery and porcelain in to have each of X, Y, Z 3 by spend platform of small fixed position to go up, pass the spatial motion of platform of small fixed position, favorable balance of trade is processed on silicon chip small three-dimensional and stereo structure. 3.

Imperceptible and supersonic treatment and photoetching machine photograph comparing, imperceptible and supersonic can machine already piece deep wide than old three-dimensional structure, can have production with lesser investment again, this decided supersonic treatment to machine the advantage of the respect in the metalloid hard fragile data such as pottery and porcelain, semiconductor silicon. Imperceptible and supersonic treatment besides treatment size is small outside, have same principle and feature with traditional and supersonic treatment. Japanese Tokyo university is stimulated with workpiece brace up working kind happened a diameter in the treatment on material of project pottery and porcelain the smallest the small hole that is Ø5µm. Imperceptible and supersonic treatment is divided commonly for two paces, use line electrode first or piece tool of preparation of craft of grinding of electrode electric spark, reoccupy this tool undertakes machining to workpiece. 4.

Imperceptible laser beam machining has imperceptible laser beam machining a lot of advantages: 1) technology measure is little, make the CNC process designing that can use Gao Rou sex to prototype; 2) machines speed fast, efficiency is tall, can undertake successive batch is produced; 3) closes to adding workshop and working environment demand is not high, also do not need valuable treatment tool; 4) can process any data: No matter be soft hard, no matter be electric,still also be not electric, if the polymer, pottery and porcelain, glass, crystal, conductor, semiconductor, dielectric, material that suppress report, biology material, blame is planar base piece, the light standard of all sorts of ply; 5) and flat engrave corrode craft and technology of film of smooth attack by surprise to have very good compatibility; 6) treatment precision is tall, stimulate diameter of facula of beam of light to be able to amount to Ø1µm the following, can undertake exceeding imperceptible treatment. Latter, laser beam machining also begins to develop to direction of small three-dimensional structure, company of small technology of weapon of fort of Er of German sea heart developed machine tool of laser beam machining of tall nicety of small three-dimensional structure, on this machine tool, their ultraviolet ray with wavelengh 355nm is used on the tall hardness material such as pottery and porcelain statified the method of purify, got small three-dimensional structure. Every time purify deepness is 1.

3µ , structural total depth is 150µ . Gotten exterior quality can be rivalled with electric spark treatment, but the restriction that it does not accept material physics character. Using krypton fluorine (the nickel rotor turbine that go out duplicates in the pattern that treatment of laser of KrF) accurate element gives, the diameter is Ø470µm, tall 130µm. Once use accurate element laser preparation of imperceptible processing technique former model, this kind of method is OK with very low monovalent cost a large number of duplicate personal computer fetters spare parts. 5.

Accurate electroform electroform is machined, above all preparation gives opening model core, be in next an electroform metal grows all round its, finally again model core is taken out or dissolve. It is comfortable the situation that cannot reach at traditional purify treatment, for example extremely imperceptible aperture, and inside the surface should have the work with inferior exterior surface roughness or sectional special appearance. No matter the aperture of what appearance, its dimension precision and exterior surface roughness by model the quality decision of core, want to be able to machine honest legal system to go out with some kind only model core, can give small Kong Lai with electroform method treatment. Epilogue convention machines a method to be good at machining structure of complex instrument of three-dimensional personal computer, can make small the tradition that shrink is mechanical, and do not need too large investment to be able to have production. But, these machine a method, outside dividing laser, productivity mostly inferior. Accordingly, they very production of the small lot in applying to. With machine a mould first, the method with reoccupy duplicate mould also can undertake bigger batch is produced. The treatment of small machine is in on one hand the making development to three-dimensional and complex form, also be in at the same time to taller treatment precision and smaller size are advanced. From the point of development existing state of affairs, cutting treatment, chemistry is corroded, energy bundle treatment had reached micron class size. Because all sorts of groovy machining methods are handy, practical with favorable treatment result, and for technical personnel place hep, accordingly, it has the place that cannot replace in the production production of small machine. The market prospect of small machine on the world is very at present extensive, but because current productivity is very finite still, be in especially home, productivity is more finite, accordingly, should increase the investment strength in respect of small mechanical industry, seize opportunity, use all conditions, develop own small mechanical property. CNC Milling